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Electron beam lithography
Results: 66

#	Item
31	PAUL SCHERRER INSTITUT Technology Transfer R&D Services Add to Reading List Source URL: www.psi.ch Language: English - Date: 2014-11-28 07:19:08 Microtechnology Extreme ultraviolet lithography Nanolithography Interference lithography Electron beam lithography Photolithography Nanotechnology Photoresist Extreme ultraviolet Materials science Technology Chemistry
32	Supplementary Material for “Characterization and reduction of microfabrication-induced decoherence in superconducting quantum circuits” C. M. Quintana,1 A. Megrant,1 Z. Chen,1 A. Dunsworth,1 B. Chiaro,1 R. Barends,1 Add to Reading List Source URL: web.physics.ucsb.edu Language: English - Date: 2014-08-14 14:18:10 Semiconductor device fabrication Science Thin film deposition Physics Electromagnetism Electron beam lithography Focused ion beam Resonator Electron microscope Materials science Microtechnology Electron microscopy
33	Datasheet Sentaurus Lithography Predictive Modeling of Lithographic Processes Overview Add to Reading List Source URL: www.synopsys.com Language: English - Date: 2014-11-07 14:34:17 Computational lithography Extreme ultraviolet lithography Multiple patterning Photolithography Immersion lithography Optical proximity correction Resist Lithography Electron beam lithography Microtechnology Materials science Technology
34	Chapter[removed]Crestec CABL-9510CC High Resolution Electron Beam Lithography System (crestec[removed] Add to Reading List Source URL: nanolab.berkeley.edu Language: English - Date: 2014-11-07 10:07:02 Computer hardware Electron beam lithography GUI widget Valve Palette Double-click Mouse Vacuum Computing Humanâ€“computer interaction User interface techniques
35	INTERNATIONAL TECHNOLOGY ROADMAP FOR SEMICONDUCTORS[removed]EDITION Add to Reading List Source URL: public.itrs.net Language: English - Date: 2014-03-30 21:14:00 Extreme ultraviolet lithography Multiple patterning Nanoimprint lithography Immersion lithography Electron beam lithography Maskless lithography Photomask Resist Lithography Microtechnology Materials science Technology
36	Published in CP730, Atomic Processes in Plasmas: 14th APS Topical Conference on Atomic Processes in Plasmas , edited by J. S. Cohen, S. Mazevet, and D. P. Kilcrease, (AIP, New York, 2004) p[removed]Visible, EUV, and X- Add to Reading List Source URL: physics.nist.gov Language: English - Date: 2005-02-11 16:09:07 Particle physics Nuclear physics Electron beam Electron beam ion trap Extreme ultraviolet lithography Lawrence Livermore National Laboratory Electronvolt Extreme ultraviolet X-ray astronomy Physics Atomic physics Plasma physics
37	National Nanotechnology Infrastructure Network Vol Add to Reading List Source URL: www.nnin.org Language: English - Date: 2012-10-30 10:11:55 Materials science Focused ion beam Nanotechnology Nanometrology Nanolithography Microelectromechanical systems Electron beam lithography Scanning electron microscope Electron microscope Scientific method Electron microscopy Science
38	PRESS-RELEASE[removed]Mapper Lithography, a Portfolio Company of RUSNANO, Starts Production of Key Elements for a New Generation of Lithography Equipment A plant for the production of electronic optical elements usin Add to Reading List Source URL: en.rusnano.com Language: English - Date: 2014-07-03 02:40:24 Microtechnology Maskless lithography Rusnano Lithography Photolithography Microelectromechanical systems Electron beam lithography Immersion lithography Photoresist Materials science Technology Nanotechnology
39	INTERNATIONAL TECHNOLOGY ROADMAP FOR SEMICONDUCTORS[removed]EDITION Add to Reading List Source URL: www.itrs.net Language: English - Date: 2014-03-30 21:14:00 Extreme ultraviolet lithography Multiple patterning Nanoimprint lithography Immersion lithography Electron beam lithography Maskless lithography Photomask Resist Lithography Microtechnology Materials science Technology
40	Microsoft Word - Appendix A Eds ALL STAFF.doc Add to Reading List Source URL: www.cnf.cornell.edu Language: English - Date: 2008-01-21 18:59:16 Lithography Photolithography National Institute of Standards and Technology Design Technology Visual arts Electron beam lithography

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